| |
• |
Vertical
and horizontal chamber types
|
| |
• |
Induction
heated |
| |
• |
Graphite
susceptors for 2600 to 4000°F |
| |
• |
Forced
cooling systems |
| |
• |
Vacuum
to 10-4 torr |
| |
• |
Inert
gas purging |
|
| |
• |
High
force production presses |
| |
• |
Single
and dual rams |
| |
• |
Force
and position ram controls |
| |
• |
Charge
load locks and material handling |
| |
• |
Hot
zones for 1800° to 4000°F |
| |
• |
Clean
high vacuum to 10-4 torr |
| |
• |
Inert
and reactive gas purging |
|
